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Practical surface analysis

19943,347 citationsJournal Article

Authors

Topics & Keywords

Advanced MEMS and NEMS Technologies Advanced Materials and Mechanics Advanced Surface Polishing Techniques

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Vacuum

Volume 45, Issue 12, pp. 1227-1228

DOI: 10.1016/0042-207x(94)90087-6

Field-Weighted Citation Impact: 273.54

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