High-Efficiency, Near-Diffraction Limited, Dielectric Metasurface Lenses Based on Crystalline Titanium Dioxide at Visible Wavelengths

Metasurfaces are planar optical elements that hold promise for overcoming the limitations of refractive and conventional diffractive optics. Previous metasurfaces have been limited to transparency windows at infrared wavelengths because of significant optical absorption and loss at visible wavelengths. Here we report a polarization-insensitive, high-contrast transmissive metasurface composed of crystalline titanium dioxide pillars in the form of metalens at the wavelength of 633 nm. The focal spots are as small as 0.54 λ d , which is very close to the optical diffraction limit of 0.5 λ d . The simulation focusing efficiency is up to 88.5%. A rigorous method for metalens design, the phase realization mechanism and the trade-off between high efficiency and small spot size (or large numerical aperture) are discussed. Besides, the metalenses can work well with an imaging point source up to ±15° off axis. The proposed design is relatively systematic and can be applied to various applications such as visible imaging, ranging and sensing systems.