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Mechanical properties and reliability of aluminum nitride thin films

201860 citationsJournal Articlegreen Open Access

Authors

Elmeri Österlund · Aalto University

Jere Kinnunen · Aalto University

Ville Rontu · Aalto University

Altti Torkkeli · Murata (Finland)

Mervi Paulasto‐Kröckel · Aalto University

Topics & Keywords

Metal and Thin Film Mechanics GaN-based semiconductor devices and materials Acoustic Wave Resonator Technologies

Publication Details

Published in: Journal of Alloys and Compounds

Volume 772, pp. 306-313

DOI: 10.1016/j.jallcom.2018.09.062

Field-Weighted Citation Impact: 2.95

Mechanical properties and reliability of aluminum nitride thin films | Researchclopedia