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Plasma Deposition of Inorganic Thin Films

197818 citationsBook Chapter

Authors

John R. Hollahan · Applied Materials (United States)

Richard S. Rosler · Applied Materials (United States)

Topics & Keywords

ZnO doping and properties Semiconductor materials and devices Metal and Thin Film Mechanics

Publication Details

Published in: Elsevier eBooks

DOI: 10.1016/b978-0-12-728250-3.50013-1

Field-Weighted Citation Impact: 3.99

Plasma Deposition of Inorganic Thin Films | Researchclopedia