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Damage depth profile in α-Al2O3 induced by swift heavy ions

201911 citationsJournal Articlebronze Open Access

Authors

Alexis Ribet · Centre National de la Recherche Scientifique

Jean‐Gabriel Mattei · École Nationale Supérieure d'Ingénieurs de Caen

I. Monnet · Normandie Université

C. Grygiel · Université de Caen Normandie

Topics & Keywords

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Metal and Thin Film Mechanics

UN Sustainable Development Goals

Life below water

Publication Details

Published in: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Volume 445, pp. 41-45

DOI: 10.1016/j.nimb.2019.02.027

Field-Weighted Citation Impact: 1.16

Damage depth profile in α-Al2O3 induced by swift heavy ions | Researchclopedia