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Magnetron sputtering – Milestones of 30 years

2010404 citationsJournal Article

Authors

Günter Bräuer · Fraunhofer Institute for Surface Engineering and Thin Films

Bernd Szyszka · Fraunhofer Institute for Surface Engineering and Thin Films

Michael Vergöhl · Fraunhofer Institute for Surface Engineering and Thin Films

Ralf Bandorf · Fraunhofer Institute for Surface Engineering and Thin Films

Topics & Keywords

Metal and Thin Film Mechanics High-Temperature Coating Behaviors Diamond and Carbon-based Materials Research

Publication Details

Published in: Vacuum

Volume 84, Issue 12, pp. 1354-1359

DOI: 10.1016/j.vacuum.2009.12.014

Field-Weighted Citation Impact: 15.40

Magnetron sputtering – Milestones of 30 years | Researchclopedia