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Ion Implantation Range and Energy Deposition Distributions

1975506 citationsBook

Authors

K. B. Winterbon

Topics & Keywords

Ion-surface interactions and analysis Silicon and Solar Cell Technologies Radiation Effects in Electronics

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

DOI: 10.1007/978-1-4757-5612-8

Field-Weighted Citation Impact: 26.22

Ion Implantation Range and Energy Deposition Distributions | Researchclopedia