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Piezoelectric MEMS based acoustic sensors: A review

2019180 citationsReview

Authors

Washim Reza Ali · Academy of Scientific and Innovative Research

Mahanth Prasad · Academy of Scientific and Innovative Research

Topics & Keywords

Acoustic Wave Resonator Technologies Advanced MEMS and NEMS Technologies Gas Sensing Nanomaterials and Sensors

Publication Details

Published in: Sensors and Actuators A Physical

Volume 301, pp. 111756-111756

DOI: 10.1016/j.sna.2019.111756

Field-Weighted Citation Impact: 7.18

Piezoelectric MEMS based acoustic sensors: A review | Researchclopedia