Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

Abstract Freeform optical surfaces are advantageous to optical designers, as they provide additional degrees of freedom for optimization. The loss of rotational symmetry, however, makes measurement of freeforms more challenging. Herein, advances in interferometric areal measurement of freeform optical surfaces, including null tests, non‐null tests, near‐null tests, and adaptive null tests, are reviewed. Some new developments, in the Hartmann test, deflectometry, and phase retrieval, as representatives of non‐interferometric areal measurement, are then presented. Overall, the focus is on single‐point‐probe‐based profilometry categorized into coordinate measurements and slope‐ or curvature‐based measurements. Innovative measurement technology is trying to bridge the gap between high accuracy and high dynamic range as freeform optical surfaces are finding more applications in visible and shorter‐wavelength optics.