A new generation cost-efficient laser mask writer for mature semiconductor nodes

A New Generation Cost-efficient Laser Mask Writer for Mature Semiconductor Nodes Mycronic introduces SLX series – a new generation cost-efficient laser mask writer – to meet the ever increasing demand for laser based photomask writer driven by new semiconductor trends such as “More than Moore” and “Electronification of everything”. Photomasks of mature design nodes are required due to large variety of designs combined with price-sensitive low volume manufacturing. In this paper, Mycronic shares key technologies used in SLX series and how to achieve the cost effective mask manufacturing and demonstrates the superiority of the system by trecent evaluation data.