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Handbook of thin film process technology | Researchclopedia

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Handbook of thin film process technology

1996284 citationsJournal Article

Authors

W Steckelmacher · Sussex County Community College

Topics & Keywords

Copper Interconnects and Reliability Fluid Dynamics and Thin Films

Publication Details

Published in: Vacuum

Volume 47, Issue 3, pp. 313-313

DOI: 10.1016/0042-207x(96)80014-5

Field-Weighted Citation Impact: 7.44