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New generation of composite substrates based on a layer of LiTaO3 on silicon for surface acoustic waves components
2020
2 citations
Preprint
green Open Access
Field-Weighted Citation Impact:
0.09
New generation of composite substrates based on a layer of LiTaO3 on silicon for surface acoustic waves components | Researchclopedia
Gabrielle Aspar
·
French River Education Center
Christophe Didier
·
Soitec (France)
Isabelle Huyet
·
Soitec (France)
E. Butaud
·
Soitec (France)
Aymen Ghorbel
·
Soitec (France)
B. Tavel
·
Soitec (France)
Alexis Drouin
·
Soitec (France)
Sylvain Ballandras
·
French River Education Center