A new generation cost-efficient laser mask writer, addressable up to the 90nm node

The semiconductor industry is enjoying the “Semiconductor super cycle” catalyzed by the pandemic. In addition, the variety of semiconductor chips are increasing driven by electronification of everything resulting the demand for laser based mask writers are increasing due to lower exposure cost per mask. However, many laser mask writers in operation today are getting old. As a response to the growing demand Mycronic introduced SLX series, a new generation cost-efficient laser mask writer and the superiority of the system is demonstrated by sharing recent evaluation data with two different laser sources.