Quantitative sputtering

Abstract This review discusses experimental techniques used for determining the variety of observables in ion‐bombardment induced erosion of solid surfaces. Boundary conditions for performing reproducible and accurate sputtering yield measurements are formulated. To this end, an inventory is made of the observed systematics in several phenomena accompanying sputtering and of the more regular exceptions to the general trends, also, a brief treatment of some theoretical predictions is given, based on the available literature. Following this extensive survey, the merits and limitations of a number of measurement methods, tailored to study one or more different observables, are discussed. Techniques that seem widely applicable or highly promising are emphasized.