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AlScN films prepared by alloy targets and SAW device characteristics

202215 citationsJournal Article

Authors

Kuo Men · Grinm Advanced Materials (China)

Hao Liu · Grinm Advanced Materials (China)

Xingquan Wang · General Research Institute for Nonferrous Metals (China)

Huating Wu · Grinm Advanced Materials (China)

Daogao Wu · Grinm Advanced Materials (China)

Topics & Keywords

Acoustic Wave Resonator Technologies Metal and Thin Film Mechanics GaN-based semiconductor devices and materials

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Journal of Rare Earths

Volume 41, Issue 3, pp. 434-439

DOI: 10.1016/j.jre.2022.03.009

Field-Weighted Citation Impact: 1.14

AlScN films prepared by alloy targets and SAW device characteristics | Researchclopedia

· Grinm Advanced Materials (China)