Impact of Device Design Parameters on 15 kV SiC MOSFETs

Experimental results from 15 kV-rated SiC DMOSFETs developed by GeneSiC Semiconductor are presented. A breakdown voltage of 16.7 kV is recorded, with < 200 nA leakage current at 15 kV. R DS,ON in the range of 4-5 Ω, 12-15 Ω or 50-75 Ω were measured on MOSFETs with chip sizes of 25 mm 2 , 16 mm 2 and 9 mm 2 , respectively, with a lowest specific R DS,ON of 238 mΩ-cm 2 . The impact of MOSFET channel length and JFET width on the device performance is elucidated. Single-pulse avalanche energy = 22.1 J/cm 2 and t AV =18.2 μs is achieved. V G -+20 V gate stress applied at 175°C showed good V TH stability with only a small 200-300 mV increase during the initial stages of the stress time.