A new spatially and angularly resolved scatterometer

20220 citationsJournal Article

Authors

Elisabeth Hartmann · CSInstruments (France)

Abstract

We present the main improvements to a scatterometer developed at the Fresnel Institute allowing the spatially resolved recording (up to 1 million elementary pixels) of the light transmitted or scattered by a plane sample.

Topics & Keywords

Surface Roughness and Optical Measurements Advanced Fiber Optic Sensors Optical Coatings and Gratings

Publication Details

Published in: Optical Interference Coatings Conference (OIC) 2022

DOI: 10.1364/oic.2022.thb.7

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A new spatially and angularly resolved scatterometer

Authors

Abstract

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Publication Details