Optimal Test Structures for the Characterization of Integrated Transformers at mm-wave frequencies using the Open/Thru De-embedding Technique

This article investigates the characterization of integrated transformers at mm-wave frequencies using the open/thru de-embedding methodology. Using electromagnetic simulations, layout guidelines for the test fixture are derived which allow to obtain good accuracy of the extracted parameters in spite of the simple method. Several test structures implementing these guidelines are fabricated on a testchip in a 16nm CMOS process and measured to demonstrate the concept.