Imaging and Analysis of Semiconductor Surfaces with a Blue-Green Laser Scanning System

19930 citationsJournal Article

Authors

B. W. Worster · LightPointe (United States)

Abstract

A system to provide 3-D images of submicron surface structure, composition, and defects on semiconductor wafer surfaces using a multiwavelength blue-green laser is described.

Topics & Keywords

Surface Roughness and Optical Measurements Industrial Vision Systems and Defect Detection Advanced Optical Sensing Technologies

Publication Details

Published in: Compact Blue-Green Lasers

DOI: 10.1364/cbgl.1993.ctua.3

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Imaging and Analysis of Semiconductor Surfaces with a Blue-Green Laser Scanning System

Authors

Abstract

Topics & Keywords

Publication Details