Flexible, actinic EUV mask blank reflectometer EUV-MBR 4.0

RI offers EUV reflectometers with “spectroscopic reflectometry” measuring spectral reflectance curves in 5 seconds and excelling in spectral resolution. For quality verification our AIMER™ concept condenses the spectral reflectance into one single figure of merit, the “scanner effective reflectance”. Acquiring 20×20 mm² with 4 Megapixels is within seconds. Many of our EUVL tools use the AIMER, as for example the EUV-PRTT, which is now standard in EUV pellicle supply chain. With this development, we upgraded our tool platforms towards ultra-cleanliness and improved reliability. Combining the experience on spectral and AIMER reflectometry with the new generic platform yields our new EUV-MBR-4.0.