Towards GHz low phase noise oscillators with electro-optomechanical resonators

Optomechanical resonators have emerged as strong candidates for future integration into ultra-high-frequency oscillators. Their excellent detection limits, compared to standard electromechanical systems, make them well-suited for transducing the low-amplitude motion of stiff and miniature resonators required for ultra-high frequency operation. However, the effectiveness of optomechanical systems must be complemented by a suitable actuation scheme in this frequency range. In this paper, we propose two fully integrated on-chip alternatives, utilizing electrostatic and piezoelectric actuation, and compare their performances. We demonstrate the potential of these electro-optomechanical resonators by maintaining their signal-to-noise ratio (SNR) up to the GHz range, resulting in low-phase-noise oscillators.