High-brightness broadband laser-driven pulsed source

We present a novel high-brightness broadband laser-driven pulsed source (LDPS) for various applications in semiconductor manufacturing. By focusing a pulsed laser beam to generate a high-brightness xenon plasma, this light source offers several advantages over traditional short-arc xenon flash lamps, including smaller plasma size, shorter pulse duration, higher peak brightness, improved pulse-to-pulse stability, and potentially longer operational life. These enhancements lead to higher temporal resolution, better signal-to-noise ratio, and more consistent performance, promising to significantly improve process control and efficiency. Our experimental results confirm its superior performance and the potential for substantial benefits in semiconductor manufacturing.