High-resolution spectral-domain optical coherence tomography for surface and subsurface defect detection using broadband laser-driven light source (LDLS)

Surface and subsurface defects negatively impact yield and performance in several semiconductor and optical material manufacturing processes. We experimentally demonstrate compact, efficient, and high-resolution spectral-domain optical coherence tomography measurement using a broadband Laser-Driven Light Source (LDLS^®) for illumination. With broad spectral bandwidth, shorter light wavelengths (UV-VIS), a smooth spectral profile, and a highly efficient optical design, lateral and depth resolutions of ≤1μm are achieved. Measurement results from a prototype OCT system are shown for various semiconductor and optical materials.