Optical wafer-level testing (Conference Presentation)

High throughput testing of state-of-the-art photonic devices requires optical probe heads with the capability of multi-port coupling at the wafer level. Keystone Photonics offers probe heads based on ultra-precise micro-optics suitable for both grating coupling and edge coupling. Keystone’s technology is primarily addressing wafer-level testing companies as well as photonic foundries. The presentation will cover the underlying technology, optical performance as well as data of probes used in manufacturing environment. Moreover, novel approaches for testing devices with ultra-dense pitch will be presented.