Optimization of grazing incidence x-ray optics for special applications

Grazing incident x-ray and EUV optics (GIXO) find applications in astrophysics, laboratory hot plasma research, EUV lithography and in various imaging and spectroscopy laboratory systems. The basic design rules of grazing-incidence x-ray optics, including raytracing and mirror testing, are presented. Rotationally Symmetric Parabolic, Ellipsoidal, and Wolter mirrors as related to EUV and Soft x-ray sources were studied in detail. Source size, spectral range, magnification, geometry, materials and geometrical limitations are used as input data for calculations. Examples of mirrors designed with use of computer calculations and their experimental characterization are included.