An Innovative TSV Based Integrated Voltage Regulator

The power efficient devices have been proposed for decades. Magnetic PCBs and Si substrates have been widely used in industries recently, producing smaller sizes, high power efficient, and cost-effective devices. Despite these notable strides, various challenges persist, including large loss tangents, particularly at frequencies exceeding 400-500 MHz, cost intensive manufacturing processes, constrained size and weight parameters, and intricate production procedures. In this work, the spin spray deposition technology is proposed for depositing thick ferrite films onto FR4 PCBs producing high magnetic permeabilities. This technique yields large-size magnetic PCB panels with an enhanced and tunable relative permeability of >100. These new ferrite/PCB laminates exhibit cost-effectiveness, scalability, tunable permeability and permittivity, and better performance metrics. Notably, it also has the potential for manufacturing high Q, low loss power inductors with high inductance, which has the potential in the application of highperformance computing in the future.