Quantitative Scatterometry: Mapping Defects and Contamination on Optical Surfaces

20250 citationsJournal Article

Authors

Adrien Bolliand · Centrale Marseille

Michel Lequime · Centrale Marseille

C. Amra · Centrale Marseille

Myriam Zerrad · Centrale Marseille

Abstract

A new spatially resolved scatterometer designed for the recording of up to 400 000 elementary BRDF for a single optical component is presented. It allows quantifying the weight of defects and contamination in the scattering losses.

Topics & Keywords

Surface Roughness and Optical Measurements Advanced Surface Polishing Techniques Advanced Measurement and Metrology Techniques

Publication Details

DOI: 10.1364/oic.2025.we.8

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Quantitative Scatterometry: Mapping Defects and Contamination on Optical Surfaces

Authors

Abstract

Topics & Keywords

Publication Details