Study of Optical Losses in SiNx and SiOxNy Coatings Deposited by Plasma-enhanced Chemical Vapour Deposition for Gravitational Wave Detection

20250 citationsJournal Articlegreen Open Access

Authors

Kirstin Saunders · University of Glasgow

Tobias Herfurth · Fraunhofer Institute for Applied Optics and Precision Engineering

Simon Bublitz · Fraunhofer Institute for Applied Optics and Precision Engineering

Christian Mühlig · Fraunhofer Institute for Applied Optics and Precision Engineering

Anne-Sophie Munser · Fraunhofer Institute for Applied Optics and Precision Engineering

Des Gibson · University of the West of Scotland

Abstract

Gravitational wave detectors rely on low mechanical and optical loss mirror coatings. This work discusses optical losses through absorption and light scattering mechanisms in SiN x and SiO x N y coatings deposited by plasma-enhanced chemical vapour deposition.

Topics & Keywords

Surface Roughness and Optical Measurements Laser-induced spectroscopy and plasma Advanced Surface Polishing Techniques

Publication Details

DOI: 10.1364/oic.2025.fa.9

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Study of Optical Losses in SiNx and SiOxNy Coatings Deposited by Plasma-enhanced Chemical Vapour Deposition for Gravitational Wave Detection

Authors

Abstract

Topics & Keywords

Publication Details