Researchclopedia

Research Researchers Institutions Topics Submit About

Command Palette

Search for a command to run...

Researchclopedia

Research Researchers Institutions About

© 2026 Researchclopedia. Powered by OpenAlex under CC0 license.

Back to research

Overlay analysis calculator for SPC applications

20250 citationsJournal Article

Authors

Jochen Kinauer · Laserline (Germany)

Topics & Keywords

Advanced Surface Polishing Techniques

Publication Details

DOI: 10.1117/12.3060469

Field-Weighted Citation Impact: 0.00

Overlay analysis calculator for SPC applications | Researchclopedia