High-Q, Temperature-Compensated BAW Resonator Featuring an Integrated MicroOven

SummaryThis work introduces an aluminum nitride (AlN) based temperature-compensated bulk acoustic wave (BAW) resonator that achieves a high quality factor ( Q<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">P</inf> > 1600) in conjunction with exceptional temperature stability. The design integrates a low-power heater and temperature sensor into an ovenized platform, enabling precise control of temperature-induced frequency shifts. With a turnover temperature (ToT) of approximately 35° C, the resonator demonstrates outstanding thermal stability and the integrated micro-oven demonstrates high efficiency. Designed to be combined with a cross-coupled oscillator, the resonator maintains high Q<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">P</inf> despite the parasitics associated with oven integration. These features make it a promising candidate for demanding applications such as oscillator circuits and precision timing in modern wireless communication systems.