Atom Probe Tomography: Introduction, and Applications to Semi (2025 Update)

20250 citationsJournal Article

Authors

Abstract Presentation slides for the ISTFA 2025 Tutorial session “Atom Probe Tomography: Introduction, and Applications to Semi.”

Published in: Proceedings - International Symposium for Testing and Failure Analysis

Volume 85229, pp. j1-j63

Field-Weighted Citation Impact: 0.00