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MEMS Technology as Enabler: From Accelerometer to LiDAR

20250 citationsBook Chapter

Authors

Lj. Ristic · Mikro Systems (United States)

V. Milanović · Mikro Systems (United States)

Milena Vujosevic · Senshu University

Abhishek Kasturi · Mikro Systems (United States)

Topics & Keywords

Semiconductor Lasers and Optical Devices Advanced MEMS and NEMS Technologies Geophysics and Sensor Technology

Publication Details

Published in: Springer proceedings in physics

DOI: 10.1007/978-981-96-9782-3_17

Field-Weighted Citation Impact: 0.00

MEMS Technology as Enabler: From Accelerometer to LiDAR | Researchclopedia