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Simulating defect sensing in an industrial 28nm FD-SOI quantum dot

20250 citationsJournal Article

Authors

Benjamin Bureau · Techniques of Informatics and Microelectronics for Integrated Systems Architecture

F. Beaudoin · Nanoacademic Technologies

Pericles Philippopoulos · Nanoacademic Technologies

S. Mir · Techniques of Informatics and Microelectronics for Integrated Systems Architecture

Eva Dupont-Ferrier · Université de Sherbrooke

Abstract

International audience

Topics & Keywords

Semiconductor Quantum Structures and Devices Semiconductor materials and devices Advancements in Semiconductor Devices and Circuit Design

Publication Details

Published in: HAL (Le Centre pour la Communication Scientifique Directe)

Field-Weighted Citation Impact: 0.00

Simulating defect sensing in an industrial 28nm FD-SOI quantum dot | Researchclopedia