Parallel simulation of radio-frequency plasma discharges

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Authors

L. Ruegsegger · École Polytechnique Fédérale de Lausanne

W. Schwarzenbach · École Polytechnique Fédérale de Lausanne

Abstract

Note: Proc. 6th Joint EPS-APS International Conference on Physics Computing, Lugano, Switzerland, August 1994 , 183 - 186 (1994) Reference CRPP-CONF-1994-016 Record created on 2008-05-13, modified on 2017-05-12

Topics & Keywords

Plasma Diagnostics and Applications Advanced Data Storage Technologies

Publication Details

Published in: Infoscience (Ecole Polytechnique Fédérale de Lausanne)

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Parallel simulation of radio-frequency plasma discharges

Authors

Abstract

Topics & Keywords

Publication Details