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Purpose: To investigate the dosimetric characteristics of a prototype batch of siliconbased semiconductor detectors, RSCAN D. Material and methods: All measurements were performed on a TrueBeam linear accelerator (Varian, USA). Dosimetric equipment included two water phantoms, the 3D SCANNER and 1D SCANNER, used in conjunction with SNC Dosimetry software (SNC, USA). The dosimetric characterization involved evaluation of detector reproducibility, response linearity, and dose rate dependence in 6 MV and 10 MV photon beams, with and without flattening filters (WFF and FFF). Additionally, percent depth dose (PDD) curves and lateral beam profiles were measured for 6 MV photon beams at a depth of 1.5 cm for field sizes of 3x3, 5x5, 10x10, and 20x20 cm. Signal-to-noise ratio (SNR) and coefficient of variation (CV) were calculated for all acquired datasets. All measurements were performed in accordance with the recommendations of AAPM Task Group 142 (TG-142) and the data requirements for beam modeling as outlined in AAPM Task Group 106 (TG-106). Results: Reproducibility and response linearity deviations for both detectors were minimal, remaining within 0.7 %. The maximum dose deviation in the dose rate dependence test was 3.2 cGy for Detector #2 and 0.4 cGy for Detector #1. Depth dose curves were consistent and acceptable for the 6 MV WFF beam; however, measurements could not be reliably acquired for the 10 MV FFF beam. Beam profile measurements using the reference detector showed well-defined, flat plateau regions, high signal-to-noise ratios, and low coefficients of variation for field sizes of 3x3 and 5x5 cm. However, profiles for 10x10 and 20x20 cm fields exhibited noticeable deviations both in the plateau and penumbra regions. Conclusion: The RSCAN D silicon-based semiconductor detector, developed by RT7 LLC, demonstrates promising performance characteristics. With further refinement, it has the potential to be integrated into routine clinical quality assurance workflows and used in the generation of beam modeling datasets for medical linear accelerators.