Ultrafast NIR kHz and GHz Burst Laser Micro-Structuring of Polyimide Films

An ultrafast laser system combined with an optical delay line allowed ablation and in-scription at 1 kHz and 1 GHz pulse burst within transparent polyimide films. The two-photon-induced absorption results in clean surface ablation, while inscription results in polymer decomposition, creating carbonised regions within the polymer. Three pulse bursts at 1 GHz increased the observed coupling to the material significantly. Modified regions (with linewidths down to a few microns) were investigated using optical microscopy, white light interferometry, SEM and Raman spectroscopy, supporting the increasing carbon density relative to the pristine polymer. As depth of field was only a few microns at high NA, 3D micro-structuring was achieved. Polymer decomposition produces gaseous products, resulting in internal stress and thus affecting inscription fidelity. An inscribed subsurface electrode with dimensions of 5 mm × 0.3 mm × 3 μm connected to conducting vias had a resistance of R = 10.6 ± 0.2 kΩ, along with resistivity of ρ ~ 0.19 Ω cm; hence, it had DC conductivity, σ ~ 5.3 Scm−1. This conductivity is similar to that of bulk graphite and could well form the basis of future flexible sensors, demonstrating single-step 3D subsurface inscription of carbon or laser-induced graphene structures.