Reactive sputtering of luminescent YAG:Ce thin films by dual hollow cathode plasma-jet

Title:Data supporting the article"Reactive sputtering of luminescent YAG:Ce thin films by dual hollow cathode plasma-jet" Related publication:P. Písařík et al.,Optical Materials (2026), Article 117970https://doi.org/10.1016/j.optmat.2026.117970 Description:This repository contains numerical data used to generate the figurespresented in the associated journal article. The data are providedto ensure transparency and reproducibility of the reported results. File descriptions: - Fig02_OES_data.csv Optical emission spectroscopy (OES) data recorded during the deposition process. Columns: wavelength and emission intensity. - Fig03_LIBS_data+fit.csv Cerium concentration determined by LIBS as a function of sample position, including experimental data and geometric model fit. - Fig05_transmittance_A-H+quartz.csv Optical transmittance spectra of annealed YAG:Ce thin films (samples A–H) and reference quartz substrate. - Fig06_XRD-samples_ACFH.csv Grazing-incidence X-ray diffraction (GI-XRD) patterns of selected samples (A, C, F, H). - Fig07_PL+Thickness+Ce_concentration.csv Summary data showing photoluminescence intensity, film thickness, and cerium concentration as a function of sample position. - Fig08_PL_data.csv Room-temperature photoluminescence spectra of annealed YAG:Ce thin films (samples A–H). - Fig09_CL_data.csv Cathodoluminescence spectra of annealed YAG:Ce thin films (samples A–H). Units:- Wavelength: nm- Intensity: arbitrary units (a.u.)- Thickness: nm- Ce concentration: atomic fraction Contact:Jiří OlejníčekInstitute of Physics of the Czech Academy of SciencesEmail: olejn@fzu.cz