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Evaluation of in-line SIMS impact on device reliability and performance

20260 citationsJournal Article

Authors

Paul K. Isbester

Stefan Schoeche

Manasa Medikonda

Padraig Timoney

Daniel Lewellyn

Topics & Keywords

Ion-surface interactions and analysis Semiconductor materials and devices Radiation Effects in Electronics

Publication Details

DOI: 10.1117/12.3090740

Field-Weighted Citation Impact: 0.00

Evaluation of in-line SIMS impact on device reliability and performance | Researchclopedia