High-repetition-rate, high-average-power XUV sources based on high-harmonic generation (HHG)

We will show recent results of our Moonlander HHG source system using different laser driver system between 20 and 50 W average power at high repetition rates from 100 kHz up to 1 MHz. As example here are the output parameters of our HHG source driven by the Class 5 Black Dwarf laser, providing 17 W average power at 100 kHz repetition rate and a pulse duration of 29 fs. We measured an XUV output power of 1.4 µW for argon target gas and 2.8 µW for krypton target gas within the aluminum filter window (22-75 eV). Our next steps are the demonstration of stable operation of our HHG source for driver lasers at 200 W and 500 W average power within the joint research project MEGA-EUV with DESY, University of Hamburg and Amphos. We will discuss the technical challenges and prospects in the power scaling of these XUV sources.