Focusing sub-100fs pulses with industrial objectives: impact of spatiotemporal effects

This study analyzes the spatiotemporal behavior of ultrashort pulses focused by common industrial focusing units. A combination of ray and wave optical simulations reveal spatial variations in pulse duration caused by spectral dispersion. We investigate the focus quality as a function of pulse duration and field angle of standard optics used for micromachining, such as F-Theta lenses and microscope objectives.