Texas Instruments phase light modulator (PLM) for near infrared applications

DLP Products at Texas Instruments, Inc. has developed a phase light modulator (PLM) designed for near infrared (NIR) wavelengths. The NIR PLM leverages a mature visible PLM platform that has been demonstrated previously.1–3 An extended vertical stroke results in further displacements of the micro-electromechanical system (MEMS) which allows for utilization of wavelengths up to 1630nm. This work presents the first demonstration of a DLP MEMS phase modulator capable of 32 discrete states with NIR operation. We discuss design characteristics, early sample characterization and exciting applications for this device.