CMOS-integrated optical quantum sensing platform based on NV-diamond technology

Optical quantum sensors relying on spin resonance in nitrogen vacancy (NV)-diamond centers achieve exceptional sensitivity for measuring magnetic fields and other parameters at room temperature. Their increased precision enables previously impossible applications. However, current quantum sensors typically rely on bulky external lasers, microwave sources and complex optical configurations, constraining portable and large-scale deployments. This paper introduces a universal platform for optical quantum sensing that adapts CMOS compatible processes traditionally used in OLED-on-silicon fabrication to integrate complete optical quantum sensor elements into a CMOS microchip. By embedding light sources, antennas, and photodiodes in a layered structure, the system enables significant miniaturization, lower power consumption and enhanced robustness due to its solid-state architecture. The proposed concept enables a high degree of modularity and the realization of both single-sensor and array configurations. The envisioned architecture allows large-scale wafer-level production at relatively low cost and therefore broadens the potential use cases for optical quantum sensors.