High-power single-mode slow-light VCSEL array for compact LiDAR applications

Abstract Array-based architecture offers a scalable pathway for vertical-cavity surface-emitting lasers (VCSELs) to achieve high output power and integrated functionality within a compact monolithic footprint. In this paper, we demonstrate a high-power, single-mode VCSEL array platform based on surface-grating designs combined with array-level coupling. A 5 × 1 array achieves a continuous-wave output power of 680 mW while maintaining beam divergence close to the diffraction limit. Clear evidence of phase locking and spatial coherence across the array confirms the realization of coupled slow-light VCSEL behavior, which plays a crucial role in enhancing both output power and beam quality. Furthermore, short-pulse operation of a 2 × 1 array yields a peak power of 2.95 W with an exceptionally narrow divergence of only 0.13°, demonstrating the scalability of the proposed architecture toward high-brightness operation. These characteristics position the proposed arrays as a formidable platform for next-generation Light Detection and Ranging and high-power applications requiring precise beam control and scalable output power.