Bullseye Resonators for Ultra-High-Frequency Timing Applications

This paper presents, for the first time, bullseye optomechanical resonators with integrated electrostatic actuation and optical detection for Gigahertz (GHz) range timing applications, based on a semi-industrial fabrication process. The design achieves <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\sim 2$</tex> times higher quality factor (Q) and a predicted <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\sim 13 \text{dB}$</tex> times larger dynamic range (DR) than conventional disk resonators, indicating that these devices will offer enhanced frequency stability through reduced anchor losses and independent control of optical and mechanical modes. These results demonstrate the potential of bullseye resonators as compact, low-noise platforms for high-frequency, high-stability optomechanical oscillators in precision timing systems.