Actively-Controlled Electrostatic MEMS Transducer for Kinetic Energy Harvesting Approaching the Physical Limits of Power Conversion

We report the design, fabrication, and experimental validation of a novel MEMS electrostatic transducer optimized for electrical energy conversion from low-frequency and irregular vibrations. The device dynamics are actively controlled through an external electrical interface to maximize harvested energy. Experimental results demonstrate the feasibility of this control strategy on a MEMS device and indicate its strong potential for significantly enhancing energy extraction from irregular vibration sources.