Exploitation of Sol-Gel TiO ₂ Thin Films for MEMS Applications

Abstract Present work summarizes the latest results obtained in deposition of thin titanium dioxide (TiO 2 ) layers from sol solutions on flat Si and SiO 2 /Si substrates. Aiming exploitation of patterned films in Oxide-Metal-Oxide (OMO) strain sensing elements in cantilevers or pressure sensors, as well as membrane layers for different applications, compatibility of said TiO2layers to post-processing steps, was experimentally studied. Based on the obtained morphological and patterning data, the compatibility of these layers with processes of plasma etching in SF 6 and in wet etching in KOH solution, was assessed. Aiming integration in micro-electromechanical systems (MEMS), results are presented and the methods for further modification of the functional properties of the nanolaminated coatings, are outlined.