Properties of magnetron sputtered molybdenum oxide for application in solar cells as a function of deposition conditions

Abstract Films of MoOx have been deposited by magnetron sputtering from a MoO 3 target in either Ar or Ar + O 2 atmosphere. The substrate temperature and the oxygen content in the chamber have been varied. The transparency in the visible, the optical bandgap, the sheet resistance and the work function of the films have been determined. It is demonstrated that by varying these deposition conditions it is possible to optimize films for hole transport layers in solar cells.