Nanolaminate TiO <sub>2</sub> /Pt/TiO <sub>2</sub> structures for sensors applications

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Authors

Marco Villani · Bulgarian Academy of Sciences

Hristosko Dikov · Bulgarian Academy of Sciences

Tsvetina Ilieva · Bulgarian Academy of Sciences

Emil Tomerov · Bulgarian Academy of Sciences

Tatiana Ivanova · Bulgarian Academy of Sciences

Abstract

Abstract Oxide/metal/oxide (OMO) structures possess low resistance, due to a metal layer. Their properties are significantly affected by the composition and the thickness of the layered materials. This work presents investigation of TiO 2 /Pt/TiO 2 nanolaminate structures. The electrical and optical properties are investigated as a function of different thickness of metal layer, post deposition thermal treatments. The sheet resistance of TiO 2 /Pt/TiO 2 is as low as 50 Ω/sq.

Topics & Keywords

Gas Sensing Nanomaterials and Sensors Transition Metal Oxide Nanomaterials Electrical and Thermal Properties of Materials

Publication Details

Published in: Journal of Physics Conference Series

Volume 3194, Issue 1, pp. 012016-012016

DOI: 10.1088/1742-6596/3194/1/012016

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Nanolaminate TiO <sub>2</sub> /Pt/TiO <sub>2</sub> structures for sensors applications

Authors

Abstract

Topics & Keywords

Publication Details