Comparison of theory with the experimental characterization of the spatial frequency response of interferometers using a binary pseudo-random array sample

Experimental evaluations of the surface height response of an interference microscope using a binary pseudo-random array test sample are compared with a theory based on a Fourier optics model. Measurements of key instrument characteristics, including the illumination, imaging, and obscuring apertures of three different Mirau objectives, support the theoretical calculations. Agreement between experimental and theoretical modeling confirms the predictability of the spatial frequency response for the purpose of specification and optimization of instrument configuration for specific metrology tasks. The results also provide confidence in methods of compensating for the decrease in instrument response with spatial frequency.