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A surface-protection and performance-enhancement strategy for AlN piezoelectric devices using an SiO2 overlayer
2026
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Journal Article
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A surface-protection and performance-enhancement strategy for AlN piezoelectric devices using an SiO2 overlayer | Researchclopedia
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Beijing Microelectronics Technology Institute
Wenlong Jiao
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Beijing Microelectronics Technology Institute
Shaoyu Zhao
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Beijing Institute of Technology
Huikai Xie
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Beijing Institute of Technology